PG800-28
PG800-28
PG800-28
PG800-28
PG800-28
28mm 高纯压力表
产品描述
PG800-28是小型超纯压力表采用膜片式结构设计，更好地减少了内部异形腔体，极大地保证了在清洗中的洁净度，减少污染残留，充分满足半导体、光伏、特殊气体管道等压力测量。标配9/16-18UNF、C-Seal和W-Seal，全程在百级洁净室生产并真空包装，同时100%清洗，满足SEMI标准需求。
产品描述
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in class 100Cleanroom
  • Treatment
    Treatment
    Process connection Ep level:Ra ≤ 0.25 µm
  • Cleanliness
    Cleanliness
    Oil sludge residuebelow 150mg/㎡ EP grade below 50mg/㎡
技术规格
Dial Diameter
1.125"(28mm)
Measuring Range
"-30inHg~30psi，-30inHg~60psi, -30inHg~0~100psi，-30inHg~0~160psi"
Accuracy Class
NS 1.125" C Grade, Compliant with ASME B40.1
Temperature Performance
Reference temperature +20°C; performance based on variation within measurement system
Sensing Element
"Measuring Element: Nickel-Based Alloy Tightness: Leakage Rate ≤1×10⁻¹⁰ Pa·m³/s Test Method: Helium Mass Spectrometry"
Process Connection
"Material: SUS316L VIM/VAR, Axial Type (CBM) With External Nut or 9/16-18UNF Male Thread C-Seal / W-Seal"
Protection Grade
IP54 per EN 60529 /IEC 529
Case
SUS304，Electrolytic Polished
Dial
Single Scale, Pointer Stop Pin Oil-Free Marking, For Oxygen Service
Cleanliness Class
According to SEMI Standard (Special Conditions)
配置
产品配置器