PK46X

高纯数字压力开关

产品描述

PK46X系列数显高纯压力计专门设计用于满足半导体、液晶面板LED、高纯/超纯环境、特殊气体管道等应用。压力范围覆盖-14.7~6000psi，且量程可以任选；产品生产100%泄露测试，避免易燃易爆、腐蚀或有毒介质溢出风险；全程在百级洁净室生产并真空包装，同时100%清洗，满足SEMI标准需求。

产品描述

技术规格

Application

Gauge, Absolute, and Negative Pressure Measurement

Measurement Range

-14.7...0.....6000psi

Accuracy Level (@ 25 ℃)

±0.25%FS(<160psi; ±0.5%FS)

Overload Pressure

3 × Rated Pressure

Medium Temperature

-40.....125°C

Ambient Temperature

-20....85°C

Temperature Coefficient (-20~85°C)

Zero <0.1%FS/10K; Span <0.1%FS/10K

Supply Voltage

DC24V(12...32V DC)

Output Signal

4...20mA、1...5V

Process Connection

9/16-18UNF(1/4''VCR)

Connection Material

SUS 316L VIM/VAR

Diaphragm Material

316L VIM/VAR / Nickel-Based Alloy / Hastelloy

Long-Term Stability

Typical 0.25%FS/Year

Repeatability

≤0.1%

Zero Adjustment

-10%...+10% of Full Scale

Internal Surface Roughness

Ra:<0.15µm

Leakage Rate

≤1X10-10Pa.m³/s

Packaging

Double Vacuum Packaging, Compliant with SEMI E49.6

配置

产品配置器