PK86X-PSATS
PK86X-PSATS
PK86X-PSATS
侧边出线高纯开关量压力变送器
产品描述
PK86X-PS系列三合一高纯压力计专门设计用于满足半导体、液晶面板LED、高纯/超纯环境、特殊气体管道等应用。压力范围覆盖0~100Psi，且量程可以任选；产品生产100%泄露测试，避免易燃易爆、腐蚀或有毒介质溢出风险；全程在百级洁净室生产并真空包装，同时100%清洗，满足SEMI标准需求。
产品描述
  • Sealing
    Sealing
    Semi-grade W-seal
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
技术规格
Application
Gauge Pressure, Absolute Pressure, and Negative Pressure Measurement
Measurement Range
0.....100psiA
Maximum Measurement Deviation
±0.75%FS
Overload Pressure
The Rated Pressure × 3
Medium Temperature
-40....125°C
Ambient Temperature
-20....85°C
Average Temperature Coefficient(-20~85℃)
Zero:<0.1%FS/10K; Span:<0.1%FS/10K
Supply Voltage
DC24V(12...32V DC)
Output Signal
0...5V
Switch Points
2 × NPN
Display
LED Display, Dial Rotatable by 270°
Electrical Connection
Side Cable Outlet, D-SUB 15PIN (Male)
Connection Material
316L VIM/VAR
Diaphragm Material
Hastelloy C-22
Long-Term Stability
Typical 0.25%FS/Year
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Packaging: Double Vacuum Packaging, Compliant with SEMI E49.6
配置
产品配置器