PK86X
PK86X
PK86X
PK86X
PK86X
高纯开关量压力变送器
产品描述
PK86X系列三合一高纯压力计专门设计用于满足半导体、液晶面板LED、高纯/超纯环境、特殊气体管道等应用。压力范围覆盖-14.7~5000psi，且量程可以任选； 产品生产100%泄露测试，避免易燃易爆、腐蚀或有毒介质溢出风险；全程在百级洁净室生产并真空包装，同时100%清洗，满足SEMI标准需求。
产品描述
  • Sealing
    Sealing
    Semi-gradeC-Seal, W-seal.and through-typeseals
  • Testing
    Testing
    100% HeliumLeak Testing
  • Packaging
    Packaging
    Vacuum Packaging in Class 100Cleanroom
  • Treatment
    Treatment
    Process connection EP level:Ra ≤ 0.15 µm
技术规格
Application
Gauge Pressure, Absolute Pressure, and Negative Pressure Measurement
Measurement Range
-14.7....0....6000psi
Maximum Measurement Deviation
+0.5%FS(<160psi:±0.75%FS)
Overload Pressure
Overload Pressure x3 Rated Pressure
Medium Temperature
-40....125°C
Ambient Temperature
-20....85°C
Average Temperature Coefficient(-20~85℃)
Temperature Coefficient:<0.1%FS/10K; Span:<0.1%FS/10K
Supply Voltage
DC24V(12...32V DC)
Output Signal
4...20mA、0...5V、0..10V、1...5V
Process Connection
9/16-18UNF（1/4"VCR）/W-seal/C-seal
Connection Material
SUS316L VIM/VAR
Diaphragm Material
316L VIM/VAR/Nickel-based Alloy / Hastelloy
Stability
Typical: 0.25%FS/Year
Repeatability
≤ 0.1%
Zero Point Adjustment
Zero Point Adjustment: -10...+10%
Internal Surface Roughness
Ra:<0.15µm
Leakage Rate
≤1X10-10Pa.m³/s
Packaging
Packaging: Double Vacuum Packaging, Compliant with SEMI E49.6
配置
产品配置器