PG800
PG800 高纯压力表
产品描述
PG800是高纯应用专用压力表,产品全316L金属焊接结构,充分满足半导体、光伏、特殊气体管道等OEM压力测量。PG800最高精度可达1.0级,压力范围可达40Mpa(6000psi),产品全程在百级洁净室生产并真空包装,同时100%清洗,满足SEMI标准需求。产品也可以选择开关信号,电接点可选单电接点和双电接点。
产品描述
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Testing100% HeliumLeak Testing
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PackagingVacuum Packaging in Class 100Cleanroom
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TreatmentProcess connection Ra ≤ 0.4um. EP level:Ra ≤ 0.25µm
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CleanlinessOil sludge residuebelow 150mg/㎡ EP grade below 50mg/㎡
技术规格
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Dial Diameter1½"(40mm)、2"(50mm)、63mm
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Measuring Range'-0.1~0 to -0.1~0.9 MPa / 0~0.1 to 0~40 MPa (0~15 to 0~6000 psi)
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Accuracy Class"NS 1½"": Class B, per ASME B40.1 NS 2"": Class A, per ASME B40.1"
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Temperature PerformanceBased on reference temperature +20°C; maximum indication error ±0.4% of full scale per 10K variation
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Sensing Element"Stainless Steel 316L <10MPa: C-Type; >10MPa: Spiral Type Tightness: Leakage Rate ≤1×10⁻¹⁰ Pa·m³/s Test Method: Helium Mass Spectrometry"
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Process Connection"Material: Stainless Steel 316L Bottom (Radial, LM) or Back (Axial, CBM) Mounting Compression seal fitting, with nut (female thread), with external nut or 9/16-18UNF male thread, 1/4 NPT female thread"
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Protection GradeIP54 per EN 60529 /IEC 529
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Instrument MovementStainless Steel
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PointerBlack Aluminum
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DialTwo-color or three-color, dual or triple scale, pointer stop pin Oil-free marking, for oxygen service
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CaseStainless Steel 304 / 316, Electrolytic Polished
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Cleanliness ClassAccording to SEMI Standard (Special Conditions)
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Instrument GlassSafety Glass; NS 1½":Snap-in;NS 2":Screw on( twist-lock)
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Special DesignOptional electric contact switch; alternative process connections available; surface roughness of pressure fitting Ra ≤ 0.25 μm; pressure ranges up to 40 MPa with 1/4 NPT connection.
配置
产品配置器